给大家推荐一本MEMS的书

chcwaaa

[这个贴子最后由chcwaaa在 2005/09/14 03:38pm 第 1 次编辑]

给大家推荐一本MEMS的书
36章
contents
I Background and Fundamentals
1   Introduction
2   Scaling of Micromechanical Devices
3   Mechanical Properties of MEMS Materials
4   Flow Physics
5   Integrated Simulation for MEMS: Coupling
    Flow-Structure-Thermal-Electrical Domains
6   Liquid Flows in Microchannels
7   Burnett Simulations of Flows in Microdevices
8   Molecular-Based Microfluidic Simulation Models
9   Lubrication in MEMS
10  Physics of Thin Liquid Films
11  Bubble/Drop Transport in Microchannels
12  Fundamentals of Control Theory
13  Model-Based Flow Control for Distributed
14
Soft Computing in Control
Mihir Sen
and Bill Goodwine
II Design and Fabrication
15
Materials for Microelectromechanical Systems
Christian A. Zorman and
Mehran Mehregany
16
MEMS Fabrication
Marc J. Madou
17
LIGA and Other Replication Techniques
Marc J. Madou
18
X-Ray-Based Fabrication
Todd Christenson
19
Electrochemical Fabrication (EFAB™)
Adam L. Cohen
20
Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS
Robert S. Okojie
21
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide
Glenn M. Beheim
22
Microfabricated Chemical Sensors for Aerospace Applications
Gary W. Hunter, Chung-Chiun Liu and Darby B. Makel
23
Packaging of Harsh-Environment MEMS Devices
Liang-Yu Chen
and Jih-Fen Lei
© 2002 by CRC Press LLC
III Applications of MEMS
24
Inertial Sensors
Paul L. Bergstrom and Gary G. Li
25 Micromachined Pressure Sensors Jae-Sung Park,
Chester Wilson and Yogesh B. Gianchandani
26 Sensors and Actuators for Turbulent Flows Lennart Löfdahl
and Mohamed Gad-el-Hak
27 Surface-Micromachined Mechanisms Andrew D. Oliver
and David W. Plummer
28 Microrobotics Thorbjörn Ebefors and Göran Stemme
29 Microscale Vacuum Pumps E. Phillip Muntz and Stephen E. Vargo
30 Microdroplet Generators Fan-Gang Tseng
31 Micro Heat Pipes and Micro Heat Spreaders G.P. “Bud” Peterson
32 Microchannel Heat Sinks Yitshak Zohar
33 Flow Control Mohamed Gad-el-Hak
IV The Future
34 Reactive Control for Skin-Friction Reduction Haecheon Choi
35 Towards MEMS Autonomous Control of Free-Shear Flows
Ahmed Naguib
36 Fabrication Technologies for Nanoelectromechanical Systems
Gary H. Bernstein, Holly V. Goodson and Gregory L. Snider

chcwaaa

[这个贴子最后由chcwaaa在 2005/09/14 06:59pm 第 1 次编辑]

01-04

CFDNHT

书名叫什么
我感兴趣

chcwaaa

就是MEMS hand book  啊

清幽

能不能传上来啊！！！